Puyan Custom Rotary Vane Vacuum System for ESC Production
Puyan Machinery customized a rotary vane vacuum system for a semiconductor electrostatic chuck factory in Ningbo to ensure stable operation of precision processes. In the field of semiconductor core component manufacturing, the production of electrostatic chucks (ESC) imposes extremely demanding requirements on the vacuum environment. Recently, Shanghai Puyan Machinery Equipment Co., Ltd. successfully delivered a customized rotary vane vacuum system to a semiconductor electrostatic chuck production facility in Ningbo, effectively solving the customer's issues of insufficient vacuum supply and large pressure fluctuations during critical processes such as material sintering, precision bonding, and leak testing.
Project Background: High Standards for Vacuum Systems in Electrostatic Chuck Manufacturing
Electrostatic chucks are key components in semiconductor core equipment such as etchers and lithography machines. Their manufacturing process involves ceramic substrate sintering, electrode embedding, precision surface bonding, and multiple leak tests. These processes require a stable negative pressure environment, as any vacuum fluctuation can lead to sintering defects, bonding bubbles, or excessive leak rates.
The customer in Ningbo previously used small rotary vane pumps for independent air supply, which suffered from insufficient pumping speed, pressure instability when multiple pumps ran in parallel, and a lack of centralized control. As production capacity increased and process precision requirements rose, the original solution could no longer meet production demands. The customer explicitly requested a highly reliable, intelligently controlled rotary vane vacuum system capable of providing stable negative pressure to multiple pieces of equipment throughout the workshop simultaneously.
Puyan Solution: Puyan PV100 Rotary Vane Vacuum Pump + 200L Vertical Buffer Tank + Puyan PLC Control Panel
To meet the stringent requirements of the semiconductor electrostatic chuck factory, the Puyan Machinery technical team conducted an on-site survey and customized the following configuration:
- Core Vacuum Source: Puyan PV100 Rotary Vane Vacuum Pump. This pump achieves an ultimate vacuum below 0.5 mbar and a pumping speed of 100 m³/h. It features high-precision vanes and forced oil lubrication, providing smooth operation, low noise, and suitability for long-term continuous operation.
- Buffering System: 200L vertical buffer tank. The vertical design saves floor space and effectively smooths out vacuum fluctuations, ensuring stable pressure at all usage points. The tank comes standard with a drain valve and a vacuum gauge port, meeting the cleanliness and reliability requirements of a semiconductor workshop.
- Control System: Puyan PLC control panel. Utilizing a programmable logic controller, it enables one-button start/stop of the system, automatic control based on upper and lower pressure limits, fault alarms, and historical data logging. The panel is equipped with a remote communication interface for integration with the customer's factory-level monitoring system.
The complete system underwent functional testing and airtightness testing before leaving the factory. On-site installation only required connection to the main pipeline and power supply, significantly reducing commissioning time.
Project Results: Stable Vacuum, Intelligent Control, Improved Production Line Efficiency
After six months of operation, this rotary vane vacuum system has delivered significant improvements in the customer's production workshop:
- Stable and Reliable Vacuum: Even when multiple electrostatic chuck testing stations were using air simultaneously, the system vacuum level remained consistently within the set range, with no product scrap caused by insufficient pressure.
- Intelligent Automatic Operation: By setting upper and lower pressure limits on the PLC, the system automatically starts and stops based on the total air demand of the main pipeline. Overall power consumption is approximately 25% lower than that of the original decentralized air supply method.
- Easy Maintenance: The Puyan PV100 pump has a long maintenance interval. Combined with the vertical buffer tank's ability to trap dust and moisture, the estimated number of annual maintenance sessions is only 2–3, requiring minimal intervention from the equipment department.
The customer's production manager commented: "Since we switched to Puyan's rotary vane vacuum system, the workshop vacuum has never let us down. The PLC control panel is simple to operate, the pressure readings are clear at a glance, and our operators are happy to use it. For our new production lines, we will continue to choose Puyan."
Why Choose Puyan Machinery's Rotary Vane Vacuum System?
Puyan Machinery specializes in vacuum pumps and custom vacuum systems. Our core strengths lie in on-demand customization (providing non-standard designs based on air volume, vacuum level, media, etc.), our own brand with reliable quality, and rapid response (providing solutions within 24 hours). Besides semiconductor electrostatic chuck manufacturing, this rotary vane vacuum system is also widely used in lithium battery vacuum drying, food and pharmaceutical packaging, electronic component handling, medical device production, and other industries. If your plant faces issues such as insufficient vacuum, system instability, or a need for a new system, please contact Puyan Machinery for a customized solution.