Puyan Rotary Vane Vacuum System for Semiconductor Target
Puyan Machinery supplied two sets of rotary vane vacuum systems to a semiconductor materials company in Ningbo, helping to improve quality in target manufacturing. In the field of semiconductor materials manufacturing, the production of high-purity metal targets imposes strict requirements on the cleanliness, stability, and continuous operation capability of vacuum systems. Recently, Shanghai Puyan Machinery Equipment Co., Ltd. successfully delivered two customized rotary vane vacuum systems to a semiconductor materials company in Ningbo for key processes such as target sintering, vacuum melting, and packaging, effectively solving the customer's problems of insufficient pumping speed and large pressure fluctuations.
Project Background: High Standards for Vacuum Systems in Target Manufacturing
The customer is primarily engaged in the R&D and production of high-purity metal targets, with products widely used in semiconductor chip manufacturing, flat panel displays, and other fields. During the target preparation process, processes such as vacuum melting, powder sintering, and degassing treatment all require a continuously stable negative pressure environment. Any vacuum fluctuation can lead to internal pores, residual impurities, or insufficient density within the target, directly affecting product quality.
The customer previously used a single small vacuum pump for air supply. However, with production line expansion and process upgrades, the original equipment could no longer meet the simultaneous air demand of multiple workstations. The customer explicitly requested two independent rotary vane vacuum systems to serve different production areas, with automatic control and stable, reliable operation.
Puyan Solution: Puyan PV100 Vacuum Pump + 100L Horizontal Buffer Tank + Lifu Digital Pressure Switch + Puyan Control Panel
The Puyan Machinery technical team conducted an on-site survey and, based on the air usage characteristics of the two production areas, customized two identical rotary vane vacuum systems. Each system included the following core components:
- Core Vacuum Source: Puyan PV100 Rotary Vane Vacuum Pump. This pump achieves an ultimate vacuum below 0.5 mbar and a pumping speed of 100 m³/h. It features high-precision vanes and forced oil lubrication, providing smooth operation, low noise, and suitability for the long-term continuous operation required in a target manufacturing workshop.
- Buffering System: 100L horizontal buffer tank. It effectively smooths out vacuum fluctuations, ensuring stable pressure at all usage points. The tank is made of carbon steel and comes standard with a drain valve and a vacuum gauge port. Its compact design saves installation space.
- Control and Monitoring: Lifu digital pressure switch + Puyan control panel. The Lifu digital pressure switch displays the system vacuum in real time and supports upper and lower limit pressure settings for automatic start-stop control. The Puyan control panel integrates overload and phase-failure protection, offering convenient operation, safety, and reliability.
Both systems underwent program testing and airtightness testing before leaving the factory. On-site installation only required connection to the main pipeline and power supply.
Project Results: Stable Air Supply for Two Lines, Uninterrupted Production
After six months of operation of the two rotary vane vacuum systems, the customer's production workshop reported significant improvements:
- Stable and Reliable Vacuum: The two systems serve different areas independently without mutual interference. The vacuum pressure at each workstation meets process requirements, with no target quality issues caused by insufficient vacuum.
- Intelligent Automatic Operation: By setting upper and lower start-stop limits on the pressure switch, each system automatically starts and stops based on actual air demand in its respective area, avoiding idle energy consumption.
- Easy Maintenance: The PV100 pump has a long maintenance interval. Combined with the buffer tank's ability to trap impurities, the maintenance burden on the equipment department has been greatly reduced.
The customer's equipment manager commented: "Puyan's two rotary vane vacuum systems have been very worry-free. They are easy to install, operate stably, and the digital pressure display is clear at a glance. For future projects requiring vacuum systems, we will definitely consider Puyan first."
Why Choose Puyan Machinery's Rotary Vane Vacuum System?
Puyan Machinery specializes in vacuum pumps and custom vacuum systems. Our core strengths lie in on-demand customization (providing non-standard designs based on air volume, vacuum level, media, etc.), our own brand with reliable quality, and rapid response (providing solutions within 24 hours). Besides semiconductor target manufacturing, this rotary vane vacuum system is also widely used in lithium battery vacuum drying, food and pharmaceutical packaging, electronic component handling, medical device production, shipbuilding, and other industries. If your plant faces issues such as insufficient vacuum, system instability, or the need for a new system, please contact Puyan Machinery for a customized solution.