Puyan Rotary Vane Vacuum System - Semiconductor - Case Study
Puyan Machinery customized a rotary vane vacuum system for a semiconductor company in Nantong to ensure stable operation of its chip packaging production line.
In the semiconductor manufacturing industry, vacuum systems require not only high stability and cleanliness but also continuous, uninterrupted operation. Recently, Shanghai Puyan Machinery Equipment Co., Ltd. successfully delivered a customized rotary vane vacuum system to a semiconductor packaging and testing company in Nantong, effectively solving the customer's issues of insufficient vacuum and large pressure fluctuations during processes such as chip mounting, molding and curing, and leak detection.
Project Background: Stringent Requirements for Vacuum Systems in Semiconductor Production
The Nantong semiconductor company is primarily engaged in the packaging and testing of integrated circuits, involving multiple critical processes such as chip mounting, underfilling, molding and curing, and hermeticity leak detection. These processes demand extremely high stability and fast response of the vacuum system. Any pressure fluctuation can lead to quality defects such as mounting misalignment, residual bubbles, or poor sealing.
The customer had previously been using a single imported vacuum pump that had been in operation for many years. It suffered from pumping speed degradation, high maintenance costs, and a lack of a backup pump. A failure of this single pump would put the entire production line at risk of shutdown. Therefore, the customer explicitly requested a rotary vane vacuum system using high-quality rotary vane pumps, with sufficient buffering capacity and intelligent control, while meeting the reliability requirements for long-term continuous operation.
Puyan Solution: Becker KVT3.140 + 300L Horizontal Buffer Tank + Puyan Control Panel (Lifu Digital Pressure Switch)
To meet the high standards of the semiconductor facility, Puyan Machinery’s technical team conducted in-depth discussions with the customer and customized the following configuration:
- Core Vacuum Source: Becker KVT3.140 oil-free rotary vane vacuum pump. This pump achieves an ultimate vacuum of -90 kPa and a pumping speed of 129 m³/h. It features high-precision self-lubricating vanes and an oil-free design, providing smooth operation, low vibration, and clean exhaust free of oil mist. It fully satisfies the strict cleanliness and low-noise requirements of a semiconductor workshop.
- Buffering System: 300L horizontal buffer tank. It effectively smooths out vacuum fluctuations, ensuring stable pressure at all usage points. The tank is made of carbon steel with an anti-rust coating on the inner wall and comes standard with a drain valve and a vacuum gauge port.
- Control System: Puyan control panel equipped with a Lifu digital pressure switch. It displays the system vacuum level in real time, supports upper and lower limit pressure settings, enables automatic start-stop for energy-saving operation, and includes overload and phase-failure protection.
Regarding delivery and installation: The system underwent program testing and airtightness testing before leaving the factory. Upon arrival at the customer's site, it was ready for direct installation and use without the need for complex on-site commissioning. The Puyan team also provided detailed operating instructions and remote technical support.
Project Results: Stable Vacuum, Easy Maintenance, Worry-Free Production
After the rotary vane vacuum system was put into operation, the customer's production workshop reported significant improvements:
- Precise Vacuum Control: By setting the start and stop thresholds on the Lifu digital pressure switch (e.g., upper limit -85 kPa, lower limit -70 kPa), the system automatically starts and stops based on actual air demand. The vacuum level at the usage points consistently meets process requirements, completely resolving previous issues such as mounting misalignment and residual bubbles caused by pressure drops.
- Intelligent Start-Stop Energy Savings: The system operates intermittently according to the set thresholds, reducing overall power consumption by approximately 20% compared to the original single pump.
- Convenient Maintenance: The oil-free rotary vane pump requires no oil changes, resulting in minimal maintenance workload. With the buffering effect of the tank, the estimated number of annual maintenance sessions is no more than two, greatly reducing downtime.
The customer's equipment manager commented: "Puyan's rotary vane vacuum system uses a high-quality Becker oil-free pump. Combined with the control panel and buffer tank, the system operates very smoothly. Now we no longer worry about vacuum pressure drops on the production line. The digital display panel is clear and easy to read, allowing operators to monitor it effortlessly."
Why Choose Puyan Machinery's Rotary Vane Vacuum System?
Puyan Machinery specializes in vacuum pumps and custom vacuum systems. Our core strengths lie in on-demand customization (providing non-standard designs based on air volume, vacuum level, media, etc.), using top-tier international and domestic pump brands (such as Becker, Leybold, Busch, etc.), and rapid response (providing solutions within 24 hours). Besides semiconductor packaging and testing, this rotary vane vacuum system is also widely used in lithium battery vacuum drying, food and pharmaceutical packaging, electronic component handling, medical device manufacturing, and other industries. If your plant faces issues such as insufficient vacuum, system instability, or the need for a new system, please contact Puyan Machinery for a customized solution.